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Reactive Magnetron Sputter Deposition of Superconducting Niobium Titanium Nitride Thin Films with Different Target Sizes
Boy Gustaaf Cornelis Bos, David Johannes Thoen, E. A.F. Haalebos, P. M.L. Gimbel, T. M. Klapwijk, J. J.A. Baselmans, Akira Endo
Research output: Contribution to journal › Article › Scientific › peer-review
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