Reactive sputter deposition of aluminium nitride thin films as heat spreaders in IC processes

H Schellevis; L la Spina; N Nenadovic; LK Nanver

Reactive sputter deposition of aluminium nitride thin films as heat spreaders in IC processes

H Schellevis, L la Spina, N Nenadovic, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the conference "Reactive sputter processes and related phenomena"
Editors	s.n.
Place of Publication	Delft
Publisher	Nevac, Belvac, TU Delft
Pages	1-1
Number of pages	1
Publication status	Published - 2005
Event	Reactive Sputter Deposition 2005, The conference "Reactive Sputter Processes and Related Phenomena", Delft, The Netherlands - Delft Duration: 8 Dec 2005 → 9 Dec 2005

Publication series

Name
Publisher	Nevac, Belvac, TU Delft

Conference

Conference	Reactive Sputter Deposition 2005, The conference "Reactive Sputter Processes and Related Phenomena", Delft, The Netherlands
Period	8/12/05 → 9/12/05

Bibliographical note

Editors & ISBN onbekend, WPM

Keywords

conference contrib. refereed
Geen BTA classificatie

Cite this

@inproceedings{749539c3e00b4f4e86adaf897af46d59,

title = "Reactive sputter deposition of aluminium nitride thin films as heat spreaders in IC processes",

keywords = "conference contrib. refereed, Geen BTA classificatie",

author = "H Schellevis and {la Spina}, L and N Nenadovic and LK Nanver",

note = "Editors & ISBN onbekend, WPM; Reactive Sputter Deposition 2005, The conference {"}Reactive Sputter Processes and Related Phenomena{"}, Delft, The Netherlands ; Conference date: 08-12-2005 Through 09-12-2005",

year = "2005",

language = "Undefined/Unknown",

publisher = "Nevac, Belvac, TU Delft",

pages = "1--1",

editor = "s.n.",

booktitle = "Proceedings of the conference {"}Reactive sputter processes and related phenomena{"}",

}

Schellevis, H, la Spina, L, Nenadovic, N & Nanver, LK 2005, Reactive sputter deposition of aluminium nitride thin films as heat spreaders in IC processes. in s.n. (ed.), Proceedings of the conference "Reactive sputter processes and related phenomena". Nevac, Belvac, TU Delft, Delft, pp. 1-1, Reactive Sputter Deposition 2005, The conference "Reactive Sputter Processes and Related Phenomena", Delft, The Netherlands, 8/12/05.

Reactive sputter deposition of aluminium nitride thin films as heat spreaders in IC processes. / Schellevis, H; la Spina, L; Nenadovic, N et al.
Proceedings of the conference "Reactive sputter processes and related phenomena". ed. / s.n. Delft: Nevac, Belvac, TU Delft, 2005. p. 1-1.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Reactive sputter deposition of aluminium nitride thin films as heat spreaders in IC processes

AU - Schellevis, H

AU - la Spina, L

AU - Nenadovic, N

AU - Nanver, LK

N1 - Editors & ISBN onbekend, WPM

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Geen BTA classificatie

M3 - Conference contribution

SP - 1

EP - 1

BT - Proceedings of the conference "Reactive sputter processes and related phenomena"

A2 - s.n., null

PB - Nevac, Belvac, TU Delft

CY - Delft

T2 - Reactive Sputter Deposition 2005, The conference "Reactive Sputter Processes and Related Phenomena", Delft, The Netherlands

Y2 - 8 December 2005 through 9 December 2005

ER -