Read-out calibration of a SOI capacitive transducer using the pull-in voltage

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Contribution to journalArticleScientific

3 Citations (Scopus)
Original languageUndefined/Unknown
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number6
Publication statusPublished - 2008

Keywords

  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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