Real-time wavelength corrected heterodyne laser interferometry.

K Joo, JD Ellis, JW Spronck, RH Munnig Schmidt

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)38-43
Number of pages6
JournalPrecision Engineering
Volume35
Publication statusPublished - 2010

Keywords

  • CWTS JFIS < 0.75

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