Realization of high aspect ratio interconnections based on macroporous silicon

A Nichelatti, NT Nguyen, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEurosensors XVI 16th European Conference on Solid-State Transducers
EditorsJ Saneistr, P Ripka
Place of PublicationPraha, Czech Republik
PublisherCzech Technical University
Pages1-4
Number of pages4
Publication statusPublished - 2002
EventEurosensors XVI, Praha, Czech Republik; - Praha, Czech Republik
Duration: 15 Sep 200218 Sep 2002

Publication series

Name
PublisherCzech Technical University

Conference

ConferenceEurosensors XVI, Praha, Czech Republik;
Period15/09/0218/09/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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