@inproceedings{877c936f43d94ae2846f7e00aaac8df9,
title = "Realization of high aspect ratio interconnections based on macroporous silicon",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "A Nichelatti and NT Nguyen and PM Sarro",
year = "2002",
language = "Undefined/Unknown",
publisher = "Czech Technical University",
pages = "1--4",
editor = "J Saneistr and P Ripka",
booktitle = "Eurosensors XVI 16th European Conference on Solid-State Transducers",
note = "Eurosensors XVI, Praha, Czech Republik; ; Conference date: 15-09-2002 Through 18-09-2002",
}