Realization of Microwave Quantum Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

A Bruno, G de Lange, S Asaad, KL van der Enden, NK Langford, L Dicarlo

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalApplied Physics Letters
Publication statusPublished - 2015


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