Realization of Microwave Quantum Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

A Bruno; G de Lange; S Asaad; KL van der Enden; NK Langford; L Dicarlo

Realization of Microwave Quantum Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

A Bruno, G de Lange, S Asaad, KL van der Enden, NK Langford, L Dicarlo

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Applied Physics Letters
Volume	106
Publication status	Published - 2015

Keywords

CWTS 0.75 <= JFIS < 2.00

Cite this

@article{e547597528f746ce98bf6a897d3ef648,

title = "Realization of Microwave Quantum Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "A Bruno and {de Lange}, G and S Asaad and {van der Enden}, KL and NK Langford and L Dicarlo",

year = "2015",

language = "English",

volume = "106",

pages = "1--9",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

}

TY - JOUR

T1 - Realization of Microwave Quantum Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

AU - Bruno, A

AU - de Lange, G

AU - Asaad, S

AU - van der Enden, KL

AU - Langford, NK

AU - Dicarlo, L

PY - 2015

Y1 - 2015

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0003-6951

VL - 106

SP - 1

EP - 9

JO - Applied Physics Letters

JF - Applied Physics Letters

ER -