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Recombination reduction at the c-Si/RCA oxide interface through Ar-H2 plasma treatment
Kees Landheer, Paula C P Bronsveld, Ioannis Poulios, Frans D. Tichelaar, Monja Kaiser, Ruud E I Schropp*, Jatin K. Rath
*Corresponding author for this work
Research output: Contribution to journal › Letter › Scientific › peer-review
1
Citation
(Scopus)