Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

N Kumar, P Petrik, GKP Ramanandan, O El Gawhary, S Roy, SF Pereira, WMJ Coene, HP Urbach

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{99df6b08d9a2482bad6c52af4a20c5e5,

title = "Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "N Kumar and P Petrik and GKP Ramanandan and {El Gawhary}, O and S Roy and SF Pereira and WMJ Coene and HP Urbach",

year = "2014",

language = "English",

volume = "22",

pages = "24678--24688",

journal = "Optics Express",

issn = "1094-4087",

publisher = "The Optical Society",

number = "20",

}

TY - JOUR

T1 - Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

AU - Kumar, N

AU - Petrik, P

AU - Ramanandan, GKP

AU - El Gawhary, O

AU - Roy, S

AU - Pereira, SF

AU - Coene, WMJ

AU - Urbach, HP

PY - 2014

Y1 - 2014

KW - professional journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1094-4087

VL - 22

SP - 24678

EP - 24688

JO - Optics Express

JF - Optics Express

IS - 20

ER -