Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 2038-2044 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
Volume | 19 |
Publication status | Published - 2001 |
Keywords
- ZX Int.klas.verslagjaar < 2002