Reduced Calibration Error Employing Parametrized EM models and DC Load Extraction

Ehsan Shokrolahzade; Carmine De  Martino; Marco Spirito

doi:10.1109/ARFTG56062.2023.10148882

Reduced Calibration Error Employing Parametrized EM models and DC Load Extraction

Ehsan Shokrolahzade, Carmine De Martino, Marco Spirito

Electronics

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

18 Downloads (Pure)

Abstract

In this contribution we present an approach to reduce the error arising from the variations of the lumped load, due to process spread, in probe level calibrations. First, full-wave electromagnetic (EM) simulations are employed to generate the nominal standard responses, then a parametric EM simulation of the load structure is used to generate a parametrized model of the standard. The approach is tested using a Short-Open-Load-Reciprocal calibration algorithm and an impedance standard calibration substrates developed on a 150 mm Quartz wafer (400 pm thick). In this process the high fidelity of the lateral dimension of the fabricated structures, realized using IC Photolithography, allows to confine the variations of the load response to only the thin-film resistor thickness spread. The DC response of the load, measured during the calibration step, is used to identify the specific RF response of the probed load from the parametric model. A complete analysis using full-wave EM simulations accounting for process variation is presented together with a set of experimental data up to 67GHz.

Original language	English
Title of host publication	Proceedings of the 2023 100th ARFTG Microwave Measurement Conference (ARFTG)
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Electronic)	978-1-6654-7494-8
ISBN (Print)	978-1-6654-7495-5
DOIs	https://doi.org/10.1109/ARFTG56062.2023.10148882
Publication status	Published - 2023
Event	2023 100th ARFTG Microwave Measurement Conference (ARFTG) - Las Vegas, United States Duration: 22 Jan 2023 → 25 Jan 2023

Conference

Conference	2023 100th ARFTG Microwave Measurement Conference (ARFTG)
Country/Territory	United States
City	Las Vegas
Period	22/01/23 → 25/01/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Vector Network Analyzer
calibration
on-wafer
probe-level
Short Open Load Reciprocal
SOLR
Quartz

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10.1109/ARFTG56062.2023.10148882

Reduced_Calibration_Error_Employing_Parametrized_EM_models_and_DC_Load_ExtractionFinal published version, 3.08 MB

Cite this

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title = "Reduced Calibration Error Employing Parametrized EM models and DC Load Extraction",

abstract = "In this contribution we present an approach to reduce the error arising from the variations of the lumped load, due to process spread, in probe level calibrations. First, full-wave electromagnetic (EM) simulations are employed to generate the nominal standard responses, then a parametric EM simulation of the load structure is used to generate a parametrized model of the standard. The approach is tested using a Short-Open-Load-Reciprocal calibration algorithm and an impedance standard calibration substrates developed on a 150 mm Quartz wafer (400 pm thick). In this process the high fidelity of the lateral dimension of the fabricated structures, realized using IC Photolithography, allows to confine the variations of the load response to only the thin-film resistor thickness spread. The DC response of the load, measured during the calibration step, is used to identify the specific RF response of the probed load from the parametric model. A complete analysis using full-wave EM simulations accounting for process variation is presented together with a set of experimental data up to 67GHz.",

keywords = "Vector Network Analyzer, calibration, on-wafer, probe-level, Short Open Load Reciprocal, SOLR, Quartz",

author = "Ehsan Shokrolahzade and Martino, {Carmine De} and Marco Spirito",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2023 100th ARFTG Microwave Measurement Conference (ARFTG) ; Conference date: 22-01-2023 Through 25-01-2023",

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doi = "10.1109/ARFTG56062.2023.10148882",

language = "English",

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booktitle = "Proceedings of the 2023 100th ARFTG Microwave Measurement Conference (ARFTG)",

publisher = "IEEE",

address = "United States",

}

Shokrolahzade, E , Martino, CD & Spirito, M 2023, Reduced Calibration Error Employing Parametrized EM models and DC Load Extraction. in Proceedings of the 2023 100th ARFTG Microwave Measurement Conference (ARFTG). IEEE, pp. 1-4, 2023 100th ARFTG Microwave Measurement Conference (ARFTG), Las Vegas, United States, 22/01/23. https://doi.org/10.1109/ARFTG56062.2023.10148882

Reduced Calibration Error Employing Parametrized EM models and DC Load Extraction. / Shokrolahzade, Ehsan ; Martino, Carmine De ; Spirito, Marco.
Proceedings of the 2023 100th ARFTG Microwave Measurement Conference (ARFTG). IEEE, 2023. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Shokrolahzade, Ehsan

AU - Martino, Carmine De

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N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2023

Y1 - 2023

N2 - In this contribution we present an approach to reduce the error arising from the variations of the lumped load, due to process spread, in probe level calibrations. First, full-wave electromagnetic (EM) simulations are employed to generate the nominal standard responses, then a parametric EM simulation of the load structure is used to generate a parametrized model of the standard. The approach is tested using a Short-Open-Load-Reciprocal calibration algorithm and an impedance standard calibration substrates developed on a 150 mm Quartz wafer (400 pm thick). In this process the high fidelity of the lateral dimension of the fabricated structures, realized using IC Photolithography, allows to confine the variations of the load response to only the thin-film resistor thickness spread. The DC response of the load, measured during the calibration step, is used to identify the specific RF response of the probed load from the parametric model. A complete analysis using full-wave EM simulations accounting for process variation is presented together with a set of experimental data up to 67GHz.

AB - In this contribution we present an approach to reduce the error arising from the variations of the lumped load, due to process spread, in probe level calibrations. First, full-wave electromagnetic (EM) simulations are employed to generate the nominal standard responses, then a parametric EM simulation of the load structure is used to generate a parametrized model of the standard. The approach is tested using a Short-Open-Load-Reciprocal calibration algorithm and an impedance standard calibration substrates developed on a 150 mm Quartz wafer (400 pm thick). In this process the high fidelity of the lateral dimension of the fabricated structures, realized using IC Photolithography, allows to confine the variations of the load response to only the thin-film resistor thickness spread. The DC response of the load, measured during the calibration step, is used to identify the specific RF response of the probed load from the parametric model. A complete analysis using full-wave EM simulations accounting for process variation is presented together with a set of experimental data up to 67GHz.

KW - Vector Network Analyzer

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KW - on-wafer

KW - probe-level

KW - Short Open Load Reciprocal

KW - SOLR

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M3 - Conference contribution

SN - 978-1-6654-7495-5

SP - 1

EP - 4

BT - Proceedings of the 2023 100th ARFTG Microwave Measurement Conference (ARFTG)

PB - IEEE

T2 - 2023 100th ARFTG Microwave Measurement Conference (ARFTG)

Y2 - 22 January 2023 through 25 January 2023

ER -

Reduced Calibration Error Employing Parametrized EM models and DC Load Extraction

Abstract

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Keywords

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