Reduced Calibration Error Employing Parametrized EM models and DC Load Extraction

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In this contribution we present an approach to reduce the error arising from the variations of the lumped load, due to process spread, in probe level calibrations. First, full-wave electromagnetic (EM) simulations are employed to generate the nominal standard responses, then a parametric EM simulation of the load structure is used to generate a parametrized model of the standard. The approach is tested using a Short-Open-Load-Reciprocal calibration algorithm and an impedance standard calibration substrates developed on a 150 mm Quartz wafer (400 pm thick). In this process the high fidelity of the lateral dimension of the fabricated structures, realized using IC Photolithography, allows to confine the variations of the load response to only the thin-film resistor thickness spread. The DC response of the load, measured during the calibration step, is used to identify the specific RF response of the probed load from the parametric model. A complete analysis using full-wave EM simulations accounting for process variation is presented together with a set of experimental data up to 67GHz.
Original languageEnglish
Title of host publicationProceedings of the 2023 100th ARFTG Microwave Measurement Conference (ARFTG)
Number of pages4
ISBN (Electronic)978-1-6654-7494-8
ISBN (Print)978-1-6654-7495-5
Publication statusPublished - 2023
Event2023 100th ARFTG Microwave Measurement Conference (ARFTG) - Las Vegas, United States
Duration: 22 Jan 202325 Jan 2023


Conference2023 100th ARFTG Microwave Measurement Conference (ARFTG)
Country/TerritoryUnited States
CityLas Vegas

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.


  • Vector Network Analyzer
  • calibration
  • on-wafer
  • probe-level
  • Short Open Load Reciprocal
  • SOLR
  • Quartz


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