Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

A Bruno, G de Lange, S Asaad, KL van der Enden, NK Langford, L Di Carlo

Research output: Contribution to journalArticleScientificpeer-review

75 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-4
Number of pages4
JournalApplied Physics Letters
Volume106
Issue number18
DOIs
Publication statusPublished - 2015

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