Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

A Bruno; G de Lange; S Asaad; KL van der Enden; NK Langford; L Di Carlo

doi:10.1063/1.4919761

Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

A Bruno, G de Lange, S Asaad, KL van der Enden, NK Langford, L Di Carlo

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-4
Number of pages	4
Journal	Applied Physics Letters
Volume	106
Issue number	18
DOIs	https://doi.org/10.1063/1.4919761
Publication status	Published - 2015

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title = "Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates",

author = "A Bruno and {de Lange}, G and S Asaad and {van der Enden}, KL and NK Langford and {Di Carlo}, L",

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AU - Bruno, A

AU - de Lange, G

AU - Asaad, S

AU - van der Enden, KL

AU - Langford, NK

AU - Di Carlo, L

N1 - Harvest

PY - 2015

Y1 - 2015

UR - http://resolver.tudelft.nl/uuid:dae6e982-4b3d-432c-953f-8c086c6dcadf

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VL - 106

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

ER -

Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

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