Reducing residual vibrations through iterative learning control with application to a wafer stage

CL van Oosten, OH Bosgra, BG Dijkstra

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 2004 American control conference
Editors	S.n.
Place of Publication	S.l.
Publisher	AACC
Pages	5150-5155
Number of pages	6
ISBN (Print)	0-7803-8336-2
Publication status	Published - 2004
Event	2004 American control conference - Boston, United States Duration: 30 Jun 2004 → 2 Jul 2004

Name
Publisher	AACC

Conference	2004 American control conference
Country/Territory	United States
City	Boston
Period	30/06/04 → 2/07/04

IEEE Catalog Number: 04CH37538C

Keywords

@inproceedings{d56187f415de4d7f8be473082168c881,

title = "Reducing residual vibrations through iterative learning control with application to a wafer stage",

keywords = "Conf.proc. > 3 pag",

author = "{van Oosten}, CL and OH Bosgra and BG Dijkstra",

note = "IEEE Catalog Number: 04CH37538C; 2004 American control conference ; Conference date: 30-06-2004 Through 02-07-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "0-7803-8336-2",

publisher = "AACC",

pages = "5150--5155",

editor = "S.n.",

booktitle = "Proceedings of the 2004 American control conference",

}

TY - GEN

T1 - Reducing residual vibrations through iterative learning control with application to a wafer stage

AU - van Oosten, CL

AU - Bosgra, OH

AU - Dijkstra, BG

N1 - IEEE Catalog Number: 04CH37538C

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-8336-2

SP - 5150

EP - 5155

BT - Proceedings of the 2004 American control conference

A2 - S.n., null

PB - AACC

CY - S.l.

T2 - 2004 American control conference

Y2 - 30 June 2004 through 2 July 2004

ER -