@inproceedings{3262fc1afb544f50b797fc7ff0b18d00,
title = "Reduction of alloying temperature of metallization stacks containing Al/Ti/TiN from 400 to 300°C",
keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",
author = "G Lorito and LK Nanver",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-90-73461-56-7",
publisher = "STW",
pages = "482--485",
editor = "s.n.",
booktitle = "The annual workshop on semiconductor advances for future electronics and sensors",
note = "SAFE 2008, Veldhoven, the Netherlands ; Conference date: 27-11-2008 Through 28-11-2008",
}