Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

L La Spina, D Ovchinnikov, WHA Wien, AW van Herwaarden, EJG Goudena, J Loos, LK Nanver

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	403-409
Number of pages	7
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	144
Publication status	Published - 2008

Keywords

@article{329415ccc8094888adec52324fab0720,

title = "Reduction of surface roughness of a silicon chip for advanced nanocalorimetry",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{La Spina}, L and D Ovchinnikov and WHA Wien and {van Herwaarden}, AW and EJG Goudena and J Loos and LK Nanver",

year = "2008",

language = "Undefined/Unknown",

volume = "144",

pages = "403--409",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

AU - La Spina, L

AU - Ovchinnikov, D

AU - Wien, WHA

AU - van Herwaarden, AW

AU - Goudena, EJG

AU - Loos, J

AU - Nanver, LK

PY - 2008

Y1 - 2008

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0924-4247

VL - 144

SP - 403

EP - 409

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -