Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

L La Spina, D Ovchinnikov, WHA Wien, AW van Herwaarden, EJG Goudena, J Loos, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)403-409
Number of pages7
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume144
Publication statusPublished - 2008

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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