Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline

Sven Weerdenburg; Yifeng Shao; Jacob Seifert; Roland Horsten; Wim Coene

Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline

Sven Weerdenburg^*, Yifeng Shao, Jacob Seifert, Roland Horsten, Wim Coene

^*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.

Original language	English
Title of host publication	Compact EUV and X-ray Light Sources, EUVXRAY 2022
Publisher	Optica Publishing Group (formerly OSA)
Number of pages	2
ISBN (Electronic)	978-195717106-7
Publication status	Published - 2022
Event	Compact EUV and X-ray Light Sources, EUVXRAY 2022 - Budapest, Hungary Duration: 21 Mar 2022 → 25 Mar 2022

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Compact EUV and X-ray Light Sources, EUVXRAY 2022
Country/Territory	Hungary
City	Budapest
Period	21/03/22 → 25/03/22

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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EUVXRAY_2022_EW4A.2Final published version, 1.13 MB

Cite this

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title = "Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline",

abstract = "We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.",

author = "Sven Weerdenburg and Yifeng Shao and Jacob Seifert and Roland Horsten and Wim Coene",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; Compact EUV and X-ray Light Sources, EUVXRAY 2022 ; Conference date: 21-03-2022 Through 25-03-2022",

year = "2022",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

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}

Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline. / Weerdenburg, Sven ; Shao, Yifeng; Seifert, Jacob et al.

Compact EUV and X-ray Light Sources, EUVXRAY 2022. Optica Publishing Group (formerly OSA), 2022. EW4A.2 (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline

AU - Weerdenburg, Sven

AU - Shao, Yifeng

AU - Seifert, Jacob

AU - Horsten, Roland

AU - Coene, Wim

N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2022

Y1 - 2022

N2 - We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.

AB - We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.

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M3 - Conference contribution

AN - SCOPUS:85136821272

T3 - Optics InfoBase Conference Papers

BT - Compact EUV and X-ray Light Sources, EUVXRAY 2022

PB - Optica Publishing Group (formerly OSA)

T2 - Compact EUV and X-ray Light Sources, EUVXRAY 2022

Y2 - 21 March 2022 through 25 March 2022

ER -

Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline

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