Reflective 2D pixelated membranes for micromachined spatial light modules

S Sakarya, G Vdovin, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Eurosensors XIV
Editors	de R Reus, S Bouwstra
Place of Publication	Lyngby
Publisher	Mikroelektronik Centret
Pages	333-336
Number of pages	4
ISBN (Print)	87-89935-50-0
Publication status	Published - 2000
Event	14th European Conference on Solid-State Transducers, Copenhagen - Lyngby Duration: 27 Aug 2000 → 30 Aug 2000

Name
Publisher	Mikroelektronik Centret

Conference	14th European Conference on Solid-State Transducers, Copenhagen
Period	27/08/00 → 30/08/00

Keywords

@inproceedings{bf2f9bbedc16425ab78f38b308a0669c,

title = "Reflective 2D pixelated membranes for micromachined spatial light modules",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "S Sakarya and G Vdovin and PM Sarro",

year = "2000",

language = "Undefined/Unknown",

isbn = "87-89935-50-0",

publisher = "Mikroelektronik Centret",

pages = "333--336",

editor = "{R Reus}, de and {S Bouwstra}",

booktitle = "Eurosensors XIV",

note = "14th European Conference on Solid-State Transducers, Copenhagen ; Conference date: 27-08-2000 Through 30-08-2000",

}

TY - GEN

T1 - Reflective 2D pixelated membranes for micromachined spatial light modules

AU - Sakarya, S

AU - Vdovin, G

AU - Sarro, PM

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 87-89935-50-0

SP - 333

EP - 336

BT - Eurosensors XIV

A2 - R Reus, de

A2 - S Bouwstra, null

PB - Mikroelektronik Centret

CY - Lyngby

T2 - 14th European Conference on Solid-State Transducers, Copenhagen

Y2 - 27 August 2000 through 30 August 2000

ER -