Original language | English |
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IPC | H01L |
Priority date | 3/06/20 |
Publication status | Published - 2021 |
Bibliographical note
Patent: OCT-20-013Applicant: TU Delft
X. Liu (Inventor), P. Lin (Inventor), P. Apostolidis (Inventor), S. Erkens (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | H01L |
Priority date | 3/06/20 |
Publication status | Published - 2021 |