Relation between texture and stress in thin sputtered molybdenum layers.

IM van den Berk, LJ Seijbel, R Delhez

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Name

Name
Volume	672

Keywords

@inproceedings{3861036f70f3432b89f3d0ceef9ac0c9,

title = "Relation between texture and stress in thin sputtered molybdenum layers.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van den Berk}, IM and LJ Seijbel and R Delhez",

year = "2001",

language = "Undefined/Unknown",

pages = "O3.22.1--O3.22.6",

booktitle = "Mat. Res. Soc. Symp. Proc.",

}