Relative humidity sensors using porous SiC membranes and Al electrodes

E Connolly; TMH Pham; J Groeneweg; PM Sarro; PJ French

Relative humidity sensors using porous SiC membranes and Al electrodes

E Connolly, TMH Pham, J Groeneweg, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2003 Semiconductor advances for future electronics
Place of Publication	Utrecht
Publisher	Stichting voor de Technische Wetenschappen
Pages	678-682
Number of pages	5
ISBN (Print)	90-73461-39-1
Publication status	Published - 2003
Event	Semiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht Duration: 25 Nov 2003 → 26 Nov 2003

Publication series

Name
Publisher	Stichting voor de Technische Wetenschappen

Conference

Conference	Semiconductor advances for future electronics, Veldhoven, The Netherlands
Period	25/11/03 → 26/11/03

Bibliographical note

CD-ROM 50/50 EI/ECTM

Keywords

Elektrotechniek
Techniek
Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{29a204c468754c53a13d093d8c787fe1,

title = "Relative humidity sensors using porous SiC membranes and Al electrodes",

keywords = "Elektrotechniek, Techniek, Vakpubl., Overig wet. > 3 pag",

author = "E Connolly and TMH Pham and J Groeneweg and PM Sarro and PJ French",

note = "CD-ROM 50/50 EI/ECTM; Semiconductor advances for future electronics, Veldhoven, The Netherlands ; Conference date: 25-11-2003 Through 26-11-2003",

year = "2003",

language = "Undefined/Unknown",

isbn = "90-73461-39-1",

publisher = "Stichting voor de Technische Wetenschappen",

pages = "678--682",

booktitle = "SAFE 2003 Semiconductor advances for future electronics",

}

Relative humidity sensors using porous SiC membranes and Al electrodes. / Connolly, E; Pham, TMH; Groeneweg, J et al.
SAFE 2003 Semiconductor advances for future electronics. Utrecht: Stichting voor de Technische Wetenschappen, 2003. p. 678-682.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Relative humidity sensors using porous SiC membranes and Al electrodes

AU - Connolly, E

AU - Pham, TMH

AU - Groeneweg, J

AU - Sarro, PM

AU - French, PJ

N1 - CD-ROM 50/50 EI/ECTM

PY - 2003

Y1 - 2003

KW - Elektrotechniek

KW - Techniek

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-39-1

SP - 678

EP - 682

BT - SAFE 2003 Semiconductor advances for future electronics

PB - Stichting voor de Technische Wetenschappen

CY - Utrecht

T2 - Semiconductor advances for future electronics, Veldhoven, The Netherlands

Y2 - 25 November 2003 through 26 November 2003

ER -