Relative humidity sensors using porous SiC membranes and Al electrodes

E Connolly, TMH Pham, J Groeneweg, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE 2003 Semiconductor advances for future electronics
Place of PublicationUtrecht
PublisherStichting voor de Technische Wetenschappen
Pages678-682
Number of pages5
ISBN (Print)90-73461-39-1
Publication statusPublished - 2003
EventSemiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht
Duration: 25 Nov 200326 Nov 2003

Publication series

Name
PublisherStichting voor de Technische Wetenschappen

Conference

ConferenceSemiconductor advances for future electronics, Veldhoven, The Netherlands
Period25/11/0326/11/03

Keywords

  • Elektrotechniek
  • Techniek
  • Vakpubl., Overig wet. > 3 pag

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