Relative optical wavefront measurement in displacement measuring interferometer systems with sub-nm precision

AJH Meskers, D Voigt, JW Spronck

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)17920-17930
Number of pages11
JournalOptics Express
Volume21
Issue number15
DOIs
Publication statusPublished - 2013

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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