Relaxation of internal stresses in chemically vapour deposited TiN/TiB2 double layers.

J te Nijenhuis, R Delhez, JGM Becht, Th.H de Keijser, EJ Mittemeijer

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationConference Proceedings of the Fourth European Conference on Residual Stresses.
    Number of pages8
    Publication statusPublished - 1998

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