Relaxation of internal stresses in chemically vapour deposited TiN/TiB2 double layers.

J te Nijenhuis, R Delhez, JGM Becht, Th.H de Keijser, EJ Mittemeijer

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Conference Proceedings of the Fourth European Conference on Residual Stresses.
Pages	577-584
Number of pages	8
Publication status	Published - 1998

Cite this

@inproceedings{22b41e3b18b74fb8adb8890d5f5ae792,

title = "Relaxation of internal stresses in chemically vapour deposited TiN/TiB2 double layers.",

author = "{te Nijenhuis}, J and R Delhez and JGM Becht and {de Keijser}, Th.H and EJ Mittemeijer",

year = "1998",

language = "Undefined/Unknown",

pages = "577--584",

booktitle = "Conference Proceedings of the Fourth European Conference on Residual Stresses.",

}