Reliability challenges in the nanoelectronics era

Microelectronics has pervaded our lives for the past fifty years. The shift from the era of microelectronics, where semiconductor devices were measured in microns to the new era of nanoelectronics where they shrink to dimensions measured in nanometers, will make the semiconductors even more pervasive than it is today. Starting from the vision and background of ENIAC, the European Technology Platform for nanoelectronics, this paper will shortly summarise the Strategic Research Agenda (SRA) of nanoelectronics. Based on this SRA, the challenges for reliability will be discussed, and possible solutions will be suggested.