Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes

G Lorito; V Gonda; S Liu; TLM Scholtes; H Schellevis; LK Nanver

Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes

G Lorito, V Gonda, S Liu, TLM Scholtes, H Schellevis, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proc. IEEE International Conference on Microelectronics
Editors	s.n.
Place of Publication	Belgrade, Serbia
Publisher	Electron Device Society
Pages	369-372
Number of pages	4
ISBN (Print)	1-4244-0116-x
Publication status	Published - 2006
Event	IEEE International Conference on Microelectronics - Belgrade, Serbia Duration: 14 May 2006 → 17 May 2006

Publication series

Name
Publisher	Electron Device Society

Name
Volume	2

Conference

Conference	IEEE International Conference on Microelectronics
Period	14/05/06 → 17/05/06

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{54bab5a594714f02a3d50b6ab7272deb,

title = "Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "G Lorito and V Gonda and S Liu and TLM Scholtes and H Schellevis and LK Nanver",

year = "2006",

language = "Undefined/Unknown",

isbn = "1-4244-0116-x",

publisher = "Electron Device Society",

pages = "369--372",

editor = "s.n.",

booktitle = "Proc. IEEE International Conference on Microelectronics",

note = "IEEE International Conference on Microelectronics ; Conference date: 14-05-2006 Through 17-05-2006",

}

Lorito, G, Gonda, V, Liu, S, Scholtes, TLM , Schellevis, H & Nanver, LK 2006, Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes. in s.n. (ed.), Proc. IEEE International Conference on Microelectronics. Electron Device Society, Belgrade, Serbia, pp. 369-372, IEEE International Conference on Microelectronics, 14/05/06.

Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes. / Lorito, G; Gonda, V; Liu, S et al.
Proc. IEEE International Conference on Microelectronics. ed. / s.n. Belgrade, Serbia: Electron Device Society, 2006. p. 369-372.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes

AU - Lorito, G

AU - Gonda, V

AU - Liu, S

AU - Scholtes, TLM

AU - Schellevis, H

AU - Nanver, LK

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1-4244-0116-x

SP - 369

EP - 372

BT - Proc. IEEE International Conference on Microelectronics

A2 - s.n., null

PB - Electron Device Society

CY - Belgrade, Serbia

T2 - IEEE International Conference on Microelectronics

Y2 - 14 May 2006 through 17 May 2006

ER -