Reliability of micromechanical thin-film resonators

R Kazinczi

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • French, P.J., Supervisor
  • Bossche, A., Advisor
Award date18 Feb 2002
Place of PublicationDelft
Publisher
Print ISBNs90-5166-891-0
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • Diss. prom. aan TU Delft

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