Reliability of silicon nitride as structural material in MEMS

R Kazinczi; JR Mollinger; A Bossche

Reliability of silicon nitride as structural material in MEMS

R Kazinczi, JR Mollinger, A Bossche

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

7 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Materials and device characterization in micromachining II (Proceedings of SPIE 3875)
Editors	Y Vladimirsky, CR Friedrich
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Pages	174-183
Number of pages	10
ISBN (Print)	0-8194-3472-8
Publication status	Published - 1999
Event	Spie Conference on Materials and Device Characterization in Micromachining II, Santa Clara - Bellingham Duration: 20 Sept 1999 → 21 Sept 1999

Publication series

Name
Publisher	International Society for Optical Engineering

Conference

Conference	Spie Conference on Materials and Device Characterization in Micromachining II, Santa Clara
Period	20/09/99 → 21/09/99

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{fbcdb1bdac9b4fc5bbfc4345241363c2,

title = "Reliability of silicon nitride as structural material in MEMS",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "R Kazinczi and JR Mollinger and A Bossche",

year = "1999",

language = "Undefined/Unknown",

isbn = "0-8194-3472-8",

publisher = "International Society for Optical Engineering",

pages = "174--183",

editor = "{Y Vladimirsky} and {CR Friedrich}",

booktitle = "Materials and device characterization in micromachining II (Proceedings of SPIE 3875)",

note = "Spie Conference on Materials and Device Characterization in Micromachining II, Santa Clara ; Conference date: 20-09-1999 Through 21-09-1999",

}

Kazinczi, R, Mollinger, JR & Bossche, A 1999, Reliability of silicon nitride as structural material in MEMS. in Y Vladimirsky & CR Friedrich (eds), Materials and device characterization in micromachining II (Proceedings of SPIE 3875). International Society for Optical Engineering, Bellingham, pp. 174-183, Spie Conference on Materials and Device Characterization in Micromachining II, Santa Clara, 20/09/99.

Reliability of silicon nitride as structural material in MEMS. / Kazinczi, R; Mollinger, JR; Bossche, A.
Materials and device characterization in micromachining II (Proceedings of SPIE 3875). ed. / Y Vladimirsky; CR Friedrich. Bellingham: International Society for Optical Engineering, 1999. p. 174-183.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Reliability of silicon nitride as structural material in MEMS

AU - Kazinczi, R

AU - Mollinger, JR

AU - Bossche, A

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-8194-3472-8

SP - 174

EP - 183

BT - Materials and device characterization in micromachining II (Proceedings of SPIE 3875)

A2 - Y Vladimirsky, null

A2 - CR Friedrich, null

PB - International Society for Optical Engineering

CY - Bellingham

T2 - Spie Conference on Materials and Device Characterization in Micromachining II, Santa Clara

Y2 - 20 September 1999 through 21 September 1999

ER -