Reliability of silicon nitride as structural material in MEMS

R Kazinczi, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationMaterials and device characterization in micromachining II (Proceedings of SPIE 3875)
Editors Y Vladimirsky, CR Friedrich
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
Pages174-183
Number of pages10
ISBN (Print)0-8194-3472-8
Publication statusPublished - 1999
EventSpie Conference on Materials and Device Characterization in Micromachining II, Santa Clara - Bellingham
Duration: 20 Sep 199921 Sep 1999

Publication series

Name
PublisherInternational Society for Optical Engineering

Conference

ConferenceSpie Conference on Materials and Device Characterization in Micromachining II, Santa Clara
Period20/09/9921/09/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

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