@article{3652c168478642818b7495e06481eca0,
title = "Removal of vacancy type clusters by low energy ion generated self-interstitials in crystalline silicon",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "AV Fedorov and {van Veen}, A and H Schut and A Rivera",
year = "1999",
language = "Undefined/Unknown",
volume = "148",
pages = "289--293",
journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
}