Removal of vacancy type clusters by low energy ion generated self-interstitials in crystalline silicon

AV Fedorov, A van Veen, H Schut, A Rivera

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)289-293
    Number of pages5
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume148
    Publication statusPublished - 1999

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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