Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications

N Golshani; V Mohammadi; H Schellevis; CIM Beenakker; R Ishihara

doi:10.1063/1.4897959

Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications

N Golshani, V Mohammadi, H Schellevis, CIM Beenakker, R Ishihara

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	APL Materials (online)
Volume	2
Issue number	10 - 100702
DOIs	https://doi.org/10.1063/1.4897959
Publication status	Published - 2014

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10.1063/1.4897959

Cite this

@article{05bea22ad3db456987a37ddf4e2f8694,

title = "Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications",

author = "N Golshani and V Mohammadi and H Schellevis and CIM Beenakker and R Ishihara",

year = "2014",

doi = "10.1063/1.4897959",

language = "English",

volume = "2",

pages = "1--9",

journal = "APL Materials (online)",

issn = "2166-532X",

publisher = "American Institute of Physics Publising LLC",

number = "10 - 100702",

}

TY - JOUR

T1 - Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications

AU - Golshani, N

AU - Mohammadi, V

AU - Schellevis, H

AU - Beenakker, CIM

AU - Ishihara, R

PY - 2014

Y1 - 2014

U2 - 10.1063/1.4897959

DO - 10.1063/1.4897959

M3 - Article

SN - 2166-532X

VL - 2

SP - 1

EP - 9

JO - APL Materials (online)

JF - APL Materials (online)

IS - 10 - 100702

ER -