Resist thickness effects on ultra thin HSQ patterning capabilities

VA Sidorkin, AE Grigorescu, HWM Salemink, EWJM van der Drift

Research output: Contribution to journalArticleScientificpeer-review

29 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)749-751
Number of pages3
JournalMicroelectronic Engineering
Volume86
Issue number4-6
Publication statusPublished - 2009

Keywords

  • academic journal papers
  • CWTS JFIS < 0.75

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