Resolution limit for Electron-Beam induced Deposition on thick substrates

CW Hagen, N Silvis-Cividjian, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)204-211
    Number of pages8
    JournalScanning: the journal of scanning microscopies
    Volume28
    Issue number4
    Publication statusPublished - 2006

    Keywords

    • academic journal papers
    • CWTS JFIS < 0.75

    Cite this