Resolution limit for Electron-Beam-Induced-Deposition on thick substrates

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	90-91
Number of pages	2
Journal	Scanning: the journal of scanning microscopies
Volume	27
Issue number	2
Publication status	Published - 2005

Keywords

@article{5d0d5fb9b5da4f7f9c2ce271e2bc88c1,

title = "Resolution limit for Electron-Beam-Induced-Deposition on thick substrates",

keywords = "ZX CWTS JFIS < 1.00",

author = "CW Hagen and N Silvis-Cividjian and P Kruit",

year = "2005",

language = "Undefined/Unknown",

volume = "27",

pages = "90--91",

journal = "Scanning: the journal of scanning microscopies",

issn = "0161-0457",

publisher = "John Wiley & Sons",

number = "2",

}