Resolution limits in electron-beam-induced deposition

P Kruit, WF van Dorp, B van Someren, N Silvis-Cividjian, CW Hagen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings Conference APF 10
Editors	G Kido
Publisher	National Institute of Materials Science
Pages	9-16
Number of pages	8
Publication status	Published - 2005

Name
Publisher	National Institute of Materials Science

Keywords

@inproceedings{0a9fa256cafb46bf8ff5c8a6302b303d,

title = "Resolution limits in electron-beam-induced deposition",

keywords = "Conf.proc. > 3 pag",

author = "P Kruit and {van Dorp}, WF and {van Someren}, B and N Silvis-Cividjian and CW Hagen",

year = "2005",

language = "Undefined/Unknown",

publisher = "National Institute of Materials Science",

pages = "9--16",

editor = "G Kido",

booktitle = "Proceedings Conference APF 10",

}