Resolution of the multiple aperture pixel by pixel enhancement of resolution electron lithography concept.

BJ Kampherbeek, MJJ Wieland, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)117-121
    Number of pages5
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume18
    Issue number1
    Publication statusPublished - 2000

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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