Resolution of the multiple aperture pixel by pixel enhancement of resolution electron lithography concept.

BJ Kampherbeek, MJJ Wieland, P Kruit

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)117-121
Number of pages5
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume18
Issue number1
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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