Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments

K Babaei Gavan, J van der Heijden, EWJM van der Drift, HSJ van der Zant

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationSensors, IEEE 2009
Editors Evgeny Katz
PublisherIEEE Society
Pages1837-1840
Number of pages4
ISBN (Print)978-142444548-6
Publication statusPublished - 2009
EventIEEE Sensors 2009 Conference - Christchurch, New Zealand
Duration: 25 Oct 200928 Oct 2009

Conference

ConferenceIEEE Sensors 2009 Conference
CountryNew Zealand
CityChristchurch
Period25/10/0928/10/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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