Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments

K Babaei Gavan; J van der Heijden; EWJM van der Drift; HSJ van der Zant

Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments

K Babaei Gavan, J van der Heijden, EWJM van der Drift, HSJ van der Zant

QN/Kavli Nanolab Delft

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Sensors, IEEE 2009
Editors	Evgeny Katz
Publisher	IEEE
Pages	1837-1840
Number of pages	4
ISBN (Print)	978-142444548-6
Publication status	Published - 2009
Event	IEEE Sensors 2009 Conference - Christchurch, New Zealand Duration: 25 Oct 2009 → 28 Oct 2009

Conference

Conference	IEEE Sensors 2009 Conference
Country/Territory	New Zealand
City	Christchurch
Period	25/10/09 → 28/10/09

Bibliographical note

niet eerder opgevoerd

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{ef2503a08a6c4ca0a15b41158fdc1f66,

title = "Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{Babaei Gavan}, K and {van der Heijden}, J and {van der Drift}, EWJM and {van der Zant}, HSJ",

note = "niet eerder opgevoerd; IEEE Sensors 2009 Conference ; Conference date: 25-10-2009 Through 28-10-2009",

year = "2009",

language = "English",

isbn = "978-142444548-6",

pages = "1837--1840",

editor = "{Evgeny Katz}",

booktitle = "Sensors, IEEE 2009",

publisher = "IEEE",

address = "United States",

}

Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments. / Babaei Gavan, K; van der Heijden, J; van der Drift, EWJM et al.
Sensors, IEEE 2009. ed. / Evgeny Katz. IEEE, 2009. p. 1837-1840.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments

AU - Babaei Gavan, K

AU - van der Heijden, J

AU - van der Drift, EWJM

AU - van der Zant, HSJ

N1 - niet eerder opgevoerd

PY - 2009

Y1 - 2009

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-142444548-6

SP - 1837

EP - 1840

BT - Sensors, IEEE 2009

A2 - Evgeny Katz, null

PB - IEEE

T2 - IEEE Sensors 2009 Conference

Y2 - 25 October 2009 through 28 October 2009

ER -