Response time of silicon photodiodes for DUV/EUV radiation

S Xia, F Sarubbi, R Naulaerts, S Nihtianov, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

9 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationThe IMTC IEEE 2008 proceedings
EditorsB Rassa
Place of PublicationBritish Columbia, Canada
PublisherI2MTC2012
Pages1956-1959
Number of pages4
Publication statusPublished - 2008
EventInternational instrumentation and measurement technology conference, British Columbia, Canada - British Columbia, Canada
Duration: 12 May 200815 May 2008

Publication series

Name
PublisherIMTC

Conference

ConferenceInternational instrumentation and measurement technology conference, British Columbia, Canada
Period12/05/0815/05/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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