Review of add-on process modules for high-frequency silicon technology

JN Burghartz

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)409-418
    Number of pages10
    JournalMicroelectronics Reliability
    Volume45
    Issue number3-4
    DOIs
    Publication statusPublished - 2005

    Keywords

    • academic journal papers
    • ZX CWTS JFIS < 1.00

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