Review of scaling effects on physical properties and practicalities of cantilever sensors

C. K. Yang*, E. W.J.M. Van Der Drift, P. J. French

*Corresponding author for this work

Research output: Contribution to journalReview articleScientificpeer-review

Abstract

Reducing sensor dimension is a good way to increase system sensitivity and response. However the advantages gained must be weighed against other effects which also became significant during the scaling process. In this paper, the scaling effect of cantilever sensors from micrometre to nanometre regimes is reviewed. Changes in the physical properties such as Q-factor, Young's modulus, noise and nonlinear deflections, as well as effects on practical sensor applications such as sensor response and sensor readouts, are presented. Since cantilever is an elemental transducer and device building block, its scaling effects can be further extrapolated to other sensing systems and applications.

Original languageEnglish
Article number103002
Number of pages16
JournalJournal of Micromechanics and Microengineering
Volume32
Issue number10
DOIs
Publication statusPublished - 2022

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • cantilever
  • effects
  • physical
  • practicalities
  • properties
  • scaling

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