RF-MEMS wafer-level packaging using through-wafer interconnect

J Tian, S Sosin, J Iannacci, R Gaddi, M Bartek

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	442-451
Number of pages	10
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	142
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2007.09.004
Publication status	Published - 2007

Keywords

@article{015a1a85412d44a2ab7af2533c36d53d,

title = "RF-MEMS wafer-level packaging using through-wafer interconnect",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "J Tian and S Sosin and J Iannacci and R Gaddi and M Bartek",

year = "2007",

doi = "10.1016/j.sna.2007.09.004",

language = "Undefined/Unknown",

volume = "142",

pages = "442--451",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - RF-MEMS wafer-level packaging using through-wafer interconnect

AU - Tian, J

AU - Sosin, S

AU - Iannacci, J

AU - Gaddi, R

AU - Bartek, M

PY - 2007

Y1 - 2007

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

U2 - 10.1016/j.sna.2007.09.004

DO - 10.1016/j.sna.2007.09.004

M3 - Article

SN - 0924-4247

VL - 142

SP - 442

EP - 451

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

IS - 1

ER -