RF-MEMS wafer-level packaging using through-wafer interconnect

J Tian, S Sosin, J Iannacci, R Gaddi, M Bartek

    Research output: Contribution to journalArticleScientificpeer-review

    27 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)442-451
    Number of pages10
    JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
    Volume142
    Issue number1
    DOIs
    Publication statusPublished - 2007

    Keywords

    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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