Rigorous Mask-imaging using the extended Nijboer-Zernike diffraction theory.

S van Haver, JJM Braat, SF Pereira

Research output: Contribution to conferencePosterProfessional

Original languageUndefined/Unknown
Publication statusPublished - 2006
Eventtwo-day symposium "NanoNed and MicroNed" - Eindhoven
Duration: 16 Nov 200617 Nov 2006

Other

Othertwo-day symposium "NanoNed and MicroNed"
Period16/11/0617/11/06

Keywords

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