@inproceedings{1b8c8014e6ed4e94ad558907b7ca7d7d,
title = "Robust-control-relevant coprime factor identification with application to model validation of a wafer stage",
keywords = "Geen BTA classificatie",
author = "T Oomen and {Herpen van}, R and OH Bosgra",
year = "2009",
language = "Undefined/Unknown",
publisher = "SYSID",
pages = "1044--1049",
editor = "Basseville,M",
booktitle = "Proceedings of the 15th IFAC symposium on system identification",
note = "15th IFAC symposium on system identification ; Conference date: 06-07-2009 Through 08-07-2009",
}