Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

LK Nanver; L Qi; V Mohammadi; C Mok Kai Rine; WB De Boer; N Golshani; A Sammak; TLM Scholtes; A Gottwald; U Kroth; F Scholze

doi:10.1109/JSTQE.2014.2319582

Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

LK Nanver, L Qi, V Mohammadi, C Mok Kai Rine, WB De Boer, N Golshani, A Sammak, TLM Scholtes, A Gottwald, U Kroth, F Scholze

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

58 Citations (Scopus)

Original language	English
Pages (from-to)	1-11
Number of pages	11
Journal	IEEE Journal of Selected Topics in Signal Processing
Volume	20
Issue number	6
DOIs	https://doi.org/10.1109/JSTQE.2014.2319582
Publication status	Published - 2014

Bibliographical note

Harvest

Access to Document

10.1109/JSTQE.2014.2319582

Cite this

@article{f49139e486914f828cbc53ffe85f91aa,

title = "Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility",

author = "LK Nanver and L Qi and V Mohammadi and {Mok Kai Rine}, C and {De Boer}, WB and N Golshani and A Sammak and TLM Scholtes and A Gottwald and U Kroth and F Scholze",

note = "Harvest",

year = "2014",

doi = "10.1109/JSTQE.2014.2319582",

language = "English",

volume = "20",

pages = "1--11",

journal = "IEEE Journal of Selected Topics in Signal Processing",

issn = "1932-4553",

publisher = "IEEE",

number = "6",

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T1 - Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

AU - Nanver, LK

AU - Qi, L

AU - Mohammadi, V

AU - Mok Kai Rine, C

AU - De Boer, WB

AU - Golshani, N

AU - Sammak, A

AU - Scholtes, TLM

AU - Gottwald, A

AU - Kroth, U

AU - Scholze, F

N1 - Harvest

PY - 2014

Y1 - 2014

U2 - 10.1109/JSTQE.2014.2319582

DO - 10.1109/JSTQE.2014.2319582

M3 - Article

SN - 1932-4553

VL - 20

SP - 1

EP - 11

JO - IEEE Journal of Selected Topics in Signal Processing

JF - IEEE Journal of Selected Topics in Signal Processing

IS - 6

ER -