@article{e6cb30a770084e7cad762f9683361dbe,
title = "Role of atomic layer deposited aluminum oxide as oxidation barrier for silicon based materials",
author = "G Fiorentino and B Morana and S Forte and PM Sarro",
year = "2015",
doi = "10.1116/1.4904208",
language = "English",
volume = "33",
pages = "1--9",
journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "art. 01A142",
}