Role of material structure on molecular diffusion of hydrogen in a-Si:C:H films

EUW Ullersma, DK Inia, FHPM Habraken, WGHJM van Sark, WF van der Weg, A van Veen

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationProceedings Mat. Res. Soc. Symposium
    Pages141-146
    Number of pages6
    Publication statusPublished - 1998

    Keywords

    • ZX Int.klas.verslagjaar < 2002

    Cite this

    Ullersma, EUW., Inia, DK., Habraken, FHPM., van Sark, WGHJM., van der Weg, WF., & van Veen, A. (1998). Role of material structure on molecular diffusion of hydrogen in a-Si:C:H films. In Proceedings Mat. Res. Soc. Symposium (pp. 141-146)