Role of material structure on molecular diffusion of hydrogen in a-Si:C:H films

EUW Ullersma, DK Inia, FHPM Habraken, WGHJM van Sark, WF van der Weg, A van Veen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings Mat. Res. Soc. Symposium
Pages	141-146
Number of pages	6
Publication status	Published - 1998

Keywords

@inproceedings{7f14e051781c4ee9a00f84bc79a36b7e,

title = "Role of material structure on molecular diffusion of hydrogen in a-Si:C:H films",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "EUW Ullersma and DK Inia and FHPM Habraken and {van Sark}, WGHJM and {van der Weg}, WF and {van Veen}, A",

year = "1998",

language = "Undefined/Unknown",

pages = "141--146",

booktitle = "Proceedings Mat. Res. Soc. Symposium",

}