Role of material structure on molecular diffusion of hydrogen in a-Si:C:H films

EUW Ullersma, DK Inia, FHPM Habraken, WGHJM van Sark, WF van der Weg, A van Veen

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationProceedings Mat. Res. Soc. Symposium
    Number of pages6
    Publication statusPublished - 1998


    • ZX Int.klas.verslagjaar < 2002

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