Roles of secondary electrons and sputtered atoms in Ion-Beam-Induced Deposition

P Chen, HWM Salemink, PFA Alkemade

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2718-2721
Number of pages4
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume27
Issue number6
Publication statusPublished - 2009

Keywords

  • academic journal papers
  • CWTS JFIS < 0.75

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