Roles of secondary electrons and sputtered atoms in Ion-Beam-Induced Deposition

P Chen, HWM Salemink, PFA Alkemade

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2718-2721
Number of pages	4
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	27
Issue number	6
Publication status	Published - 2009

Keywords

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title = "Roles of secondary electrons and sputtered atoms in Ion-Beam-Induced Deposition",

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author = "P Chen and HWM Salemink and PFA Alkemade",

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journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

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TY - JOUR

T1 - Roles of secondary electrons and sputtered atoms in Ion-Beam-Induced Deposition

AU - Chen, P

AU - Salemink, HWM

AU - Alkemade, PFA

PY - 2009

Y1 - 2009

KW - academic journal papers

KW - CWTS JFIS < 0.75

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M3 - Article

SN - 1071-1023

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SP - 2718

EP - 2721

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -