Roughening of Si (100) and Si (111) by 1keV oblique O2+ beams.

ZX Liu, PFA Alkemade

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings SIMS-12
    Pages505-508
    Number of pages4
    Publication statusPublished - 1999

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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