Saddle-point construction in the design of Lithographic objectives, part 2: application

OE Marinescu, F Bociort

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{3b2af77120a3448a956d3a1240a3da90,

title = "Saddle-point construction in the design of Lithographic objectives, part 2: application",

keywords = "professional journal papers, CWTS JFIS < 0.75",

author = "OE Marinescu and F Bociort",

year = "2008",

language = "Undefined/Unknown",

volume = "47",

pages = "093003--1--093001--4",

journal = "Optical Engineering",

issn = "0091-3286",

publisher = "SPIE",

number = "9",

}