Saddle-point construction in the design of lithographic objectives, part 1, method.

OE Marinescu, F Bociort

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{221181f1e9194da19a5082074bf91094,

title = "Saddle-point construction in the design of lithographic objectives, part 1, method.",

keywords = "professional journal papers, CWTS JFIS < 0.75",

author = "OE Marinescu and F Bociort",

year = "2008",

language = "Undefined/Unknown",

volume = "47",

pages = "093002--1--093002--6",

journal = "Optical Engineering",

issn = "0091-3286",

publisher = "SPIE",

number = "9",

}