Saddle-point construction in the design of lithographic objectives, part 1, method.

OE Marinescu, F Bociort

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)093002-1-093002-6
JournalOptical Engineering
Volume47
Issue number9
Publication statusPublished - 2008

Keywords

  • professional journal papers
  • CWTS JFIS < 0.75

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