Scanning effects in coherent Fourier scatterometry

S Roy, O El Gawhary, N Kumar

Research output: Contribution to journal › Article › Scientific › peer-review

12 Citations (Scopus)

Original language	English
Pages (from-to)	1-7
Number of pages	7
Journal	Journal of the European Optical Society - Rapid Publications
Volume	7
DOIs	https://doi.org/10.2971/jeos.2012.12031
Publication status	Published - 2012

12031

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title = "Scanning effects in coherent Fourier scatterometry",

author = "S Roy and {El Gawhary}, O and N Kumar",

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AU - Roy, S

AU - El Gawhary, O

AU - Kumar, N

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DO - 10.2971/jeos.2012.12031

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