Scanning effects in coherent Fourier scatterometry

S Roy, O El Gawhary, N Kumar

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalJournal of the European Optical Society - Rapid Publications
Volume7
DOIs
Publication statusPublished - 2012

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