Sealing RIE etch holes for an epi-micromachined pressure sensor

JFL Goosen, JP Dartee, C den Boer, PJ French, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationMME '00
Editors Y Bäcklund, C Hedlund
Place of PublicationS.l.
Publishers.n.
Pages1-4
Number of pages4
Publication statusPublished - 2000
EventMicromechanics Europe, Uppsala - S.l.
Duration: 1 Oct 20003 Oct 2000

Publication series

Name
PublisherS.n.

Conference

ConferenceMicromechanics Europe, Uppsala
Period1/10/003/10/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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