Selective Aluminum CVD on SI(100) from DMAH.

C Bisch, S Rogge, T Melin, GCAM Janssen

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings MRS Fall 99, symposium E, Nucleation and Growth Processes in Materials
    EditorsA Gonis, PEA Turchi, AJ Ardell
    Pages141-146
    Number of pages6
    Publication statusPublished - 1999

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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